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TRACE DATA
Data capture starts and stops automatically with each run.
Temp Data, Gas Flow Rate Data and others data will be collected.
Compare Two Trace Data
We can prepare two previous runs of same recipe.
If we get different result in wafer test, we can easily find out each process condition and feed back it soon.
Separate View
We can separate each data.
Tepreature data ( 1,100 degreeC),
Boat speed data (Max100%)
MFC Flow rate (20L)
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