Situation of Diffusion Furnace and My Proposal

IC maker and Silicon maker have many Diffusion furnaces and LP-CVD furnaces, but they can not get enough technical support and trouble support from equipment maker.

System Condition

Many Horizontal Furnaces still work in the field.
Furnace is always new by the replacement with the heater and some mechanical parts.

Support of the maker

TEL, Kokusai and the others don't support for the Horizontal Furnace.
Many parts is obsolete.
No Upgraded Controller.
No Repair Controller.

Current Issue

If trouble occurred. It takes a lot of time for the recover.
Some case, the furnace is dead.
Never work well forever.
Customer has the great anxiety for the system.

Solution & Merit

Same Operatio for TEL, KE and others Equipments.
Easy Operation/Windows Like.
Data Capture
  Help your daily work, Easy watch tool status
Extendibility
  Remote Access, Communicate to CIM Host, SPC

AST Inc.

The designer of TEL's controller/Model 3100, 3200 and 340 will support you.