Tokyo Electron Limited (TEL)
Replace TEL's Controller by JGA/ICCI's CTL in DL-Furnace
Before : 8816D / EF-50D / ANA-Lock / DPM / Gas Flow Chart
After : GMI-HOST / SLC99 / EF-50D / Gas Flow Chart
Use conventional TEL's EF-50D and Gas Flow Chart.
Remove ANA-Lock and Insert new Temperature Module.
Retrofit Other TEL's Equipments
UL-2604, UX-1080-4HT Diffusion Furnace
XL-LPCVD Furnace etc.